ALD簡(jiǎn)介
原子層沉積技術(shù)(Atomic Layer Deposition，簡(jiǎn)稱ALD)是一種在納米尺度上進(jìn)行薄膜沉積的先進(jìn)技術(shù)。通過(guò)將物質(zhì)以單原子形式一層一層的鍍?cè)诨妆砻妫瑩碛袃?yōu)異的三維共形性、大面積成膜的均勻性和精確控制膜厚等特點(diǎn)。
ALD應(yīng)用
ALD在能源領(lǐng)域應(yīng)用
2009年，Miyaska課題組將鈣鈦礦材料MAPbI3用作燃料敏化太陽(yáng)能電池的光伏活性層，正式開(kāi)啟了鈣鈦礦太陽(yáng)能電池的新紀(jì)元。ALD憑借其均勻成膜性、精準(zhǔn)控制厚度和保形性等多種優(yōu)勢(shì)，在光伏領(lǐng)域中發(fā)揮著重要作用。除此之外，ALD技術(shù)還可用于鋰電池薄膜涂層，提高電池性能。
ALD在泛半導(dǎo)體應(yīng)用
隨著泛半導(dǎo)體行業(yè)的發(fā)展，對(duì)微型化和集成化要求越來(lái)越高，尺寸縮小至亞微米和納米量級(jí)，ALD作為一種高精度薄膜沉積技術(shù)，可用于晶體管柵極電介質(zhì)層(高K材料)、金屬柵電極、有機(jī)發(fā)光顯示器涂層、銅互聯(lián)擴(kuò)散阻擋層、DRAM電介質(zhì)層、微流體和MEMS涂層、傳感器等眾多領(lǐng)域。
ALD在光學(xué)領(lǐng)域應(yīng)用
由于 ALD 具有的三維共形沉積和大面積均勻性特點(diǎn)，已成功應(yīng)用于高質(zhì)量光學(xué)薄膜、增透膜、折射率可調(diào)的光學(xué)薄膜、波狀多層膜，改善了光子晶體的光學(xué)性質(zhì)和可控性，增加了光子晶體在未來(lái)光學(xué)器件中的應(yīng)用潛力。
公司致力于ALD高純半導(dǎo)體薄膜前驅(qū)體材料的自主研發(fā)和生產(chǎn)，成立以來(lái)，已陸續(xù)向多家半導(dǎo)體客戶提供了百余種前驅(qū)體新材料，包括高純硅基前驅(qū)體系列、High-k前驅(qū)體系列產(chǎn)品，部分新品已被客戶用于5nm以下制程薄膜設(shè)備。我們致力為客戶提供優(yōu)質(zhì)的產(chǎn)品并建立互信、長(zhǎng)久的合作關(guān)系，產(chǎn)品具有自主知識(shí)產(chǎn)權(quán)且原材料國(guó)產(chǎn)化，打破國(guó)外壟斷的同時(shí)保證供應(yīng)鏈的安全。研峰科技愿與國(guó)內(nèi)芯片、高端顯示、光伏新能源等高端客戶一起攜手，解決高端半導(dǎo)體材料的把脖子難題，早日實(shí)現(xiàn)進(jìn)口替代。
| Chemical Name | Tetrakis(dimethylamino)tin(IV) TDMASn |
|---|
| Synonym |
Tin(IV) dimethylamide
tetrakis-(dimethylamino-)-stannane
Tetrakis-(dimethylamino)-zinn
Tetrakis(dimethylamino)stannane
四(二甲氨基)錫
Tetrakis(dimethylamino)tin |
| Chemical Name Translation | 四(二甲氨基)錫 |
|---|
| InChIKey | WHXTVQNIFGXMSB-UHFFFAOYSA-N |
|---|
| PubChem Substance ID | 16684220 |
|---|
| LabNetwork Molecule ID | LN01253175 |
|---|
| InChI | InChI=1S/4C2H6N.Sn/c4*1-3-2;/h4*1-2H3;/q4*-1;+4 |
|---|
| MDL Number | MFCD00014860 |
|---|
| CAS Number | 1066-77-9 |
|---|
GHS Symbol
| WGK Germany | 3 |
|---|
| Precautionary statements | |
|---|
- P210 Keep away from heat/sparks/open flames/hot surfaces. — No smoking. 遠(yuǎn)離熱源/火花/明火/熱的表面。——禁止吸煙。
- P310 Immediately call a POISON CENTER or doctor/physician. 立即呼救解毒中心或醫(yī)生/醫(yī)師。
- P280 Wear protective gloves/protective clothing/eye protection/face protection. 戴防護(hù)手套/防護(hù)服/眼睛的保護(hù)物/面部保護(hù)物。
- P305+P351+P338
|
| Hazard statements | |
|---|
- H314 Causes severe skin burns and eye damage 導(dǎo)致嚴(yán)重的皮膚灼傷和眼睛損傷
- H332 Harmful if inhaled 吸入有害
- H225 Highly flammable liquid and vapour 高度易燃液體和蒸氣
- H312 Harmful in contact with skin 皮膚接觸有害
- H302 Harmful if swallowed 吞食有害
- H302+H312+H332
|
| Hazard Codes |
F,C
F;C |
| Personal Protective Equipment |
Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US) |
| Signal word |
Danger |
| Safety Statements | |
|---|
- S26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice 眼睛接觸后，立即用大量水沖洗并征求醫(yī)生意見(jiàn)；
- S36/37/39 Wear suitable protective clothing, gloves and eye/face protection 穿戴適當(dāng)?shù)姆雷o(hù)服、手套和眼睛/面保護(hù)；
- S45 In case of accident or if you feel unwell seek medical advice immediately (show the label where possible) 發(fā)生事故時(shí)或感覺(jué)不適時(shí)，立即求醫(yī)（可能時(shí)出示標(biāo)簽）；
- S16 Keep away from sources of ignition - No smoking 遠(yuǎn)離火源，禁止吸煙；
|
| Risk Statements | |
|---|
- R11 Highly flammable 非常易燃
- R20/21/22 Harmful by inhalation, in contact with skin and if swallowed 吸入、皮膚接觸和不慎吞咽有害
- R34 Causes burns 會(huì)導(dǎo)致灼傷
|
| UN Number |
2924 |
| Restrict |
危險(xiǎn)品 |
{uni_hamburg} Short: II/25D
Title: Structure Data of Free Polyatomic Molecules: Molecules Containing Five or More Carbon Atoms
Author: Graner, G.; Hirota, E.; Iijima, T.; Kuchitsu, K.; Ramsay, D.A.; Vogt, J.; Vogt, N.
Editor: Kuchitsu, K.
Source: Landolt-B?rnstein, New Series
Volume: II/25D
Year: 2003
Keyword: Free Polyatomic Molecules; Carbon Atoms; Molecules
ISBN: 3-540-42860-7
ISBN: 978-3-540-42860-2
Internet Resource: DOI:10.1007/b75952
RefComment: VIII, 569 pages. Hardcover
RefComment: Written for scientists and researchers in the fields of chemistry and physics
Abstract: This fourth subvolume presents data on the geometric parameters (internuclear distances, bond angles, dihedral angles of internal rotation etc) of free polyatomic molecules including free radicals and molecular ions. The survey on structure data consists of four subvolumes, each containing the geometric parameters determined in the gas phase either by an analysis of the rotational constants (and sometimes the vibrational constants) obtained from microwave, infrared, Raman, electronic and photoelectron spectroscopy or by an analysis of electron diffraction intensities. Most of the structures listed in the tables are for molecules in the electronic ground state, but structures for electronically excited states have also been included as far as they are available. In this fourth subvolume, the structure of molecules containing five to sixty carbon atoms is listed.
{uni_hamburg} Short: III/38A
Title: Refractive Indices of Inorganic, Organometallic, and Organononmetallic Liquids and Binary Liquid Mixtures
Author: Wohlfarth, Ch.; Wohlfarth, B.
Editor: Lechner, M.D.
Source: Landolt-B?rnstein, New Series
Volume: III/38A
Year: 1996
Keyword: organicmetallic compounds; inorganic compounds; refractive index; liquids; mixtures
ISBN: 3-540-60539-8
ISBN: 978-3-540-60539-3
Internet Resource: DOI:10.1007/b55612
RefComment: VII, 400 pages, Hardcover
Abstract: Volume III/38 Optical Constants provides critical
